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ThomasFabula / Modeling-of-Resonant-Silicon-Microsensors
Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials
fem resonant resonant-frequency sensor sensors analytics finite-element-analysis finite-element-methods finite-elements simulation transducers mems resonator silicon microtech thinfilm zinkoxid
2
ThomasFabula / papers
Papers & Publications
papers ansys finite-element-analysis finite-element-methods finite-elements mems piezo-actuator piezo-sensor piezoelectric-materials piezoelectric-sensors sensor sensors silicium silicon silizium transducer transducers zno zinkoxid
Language:TeX 0
ThomasFabula / Actuators
Aktoren-Antrieb mit piezoelektrische Duennschichten - ZnO/AlN, etc.
actuators aktor piezoelectric silicon thinfilm zinkoxid zno aktuator
Language:Rich Text Format
ThomasFabula / FASENS_Si-ZnO_M723
FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3
bosch-sensor experimental frequency-analysis mems microsystems pressure-sensor resonance resonant-frequency sensor silicon zinkoxid zno
Language:Pascal