There are 0 repository under silizium topic.
ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
MEMS patent
BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung Frequenzanaloger Sensoren, HSG-IMIT, Villingen-Schwenningen
Papers, Publications & oral presentations
Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems
ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)