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ThomasFabula / piezoelectric_simulation
ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
fem ansys finite-element-analysis finite-element-methods finite-elements mems zno aln piezoelectric piezoelectric-materials piezoelectric-sensors pzt thin-film vibrit silicon silizium frequency-analysis piezo piezo-sensor multiphysics
Language:Roff 4