SPIE 2014 paper on e-beam lithography of Si gratings
High Performance Si Immersion Gratings Patterned with Electron Beam Lithography
Authors
- Michael Gully-Santiago, University of Texas at Austin, Dept. of Astronomy
- Dan Jaffe, University of Texas at Austin, Dept. of Astronomy
- Dan Wilson, NASA JPL Microdevices Laboratory
- Richard Muller, NASA JPL Microdevices Laboratory
Compiling
There is some finesse required to get this to compile at the moment. I'm using the SPIE template and going from there.
License
Copyright 2014 by the authors. All rights reserved.