bithost-gmbh/txlwizard

Introduction

This document describes the usage and technical reference of the python program TXLWizard written by Esteban Marin (estebanmarin@gmx.ch).

What does it do?

The TXLWizard provides routines for generating TXL files (.txl) for the preparation of E-Beam lithography masks using python code. The TXL files can be processed with BEAMER. See the following links:

http://genisys-gmbh.com/web/products/beamer.html

The TXLWizard currently implements version 4.8 of the TextLIB (TXL) standard.

The generated TXL files are also converted to HTML / SVG for presentation in any modern browser or vector graphics application and allow rapid mask development.

Moreover, a command line interface TXLConverter provides conversion of existing TXL files to HTML / SVG (See Section :ref:`sec-TXLConverter`).

Why should I use it?

TXL File Format:

Text-based file format
Can be generated with any scripting language (Python / Matlab / etc.)
Easy to use
Optimized E-Beam Performance due to References to objects and array of replicated objects (SREF, AREF)

TXLWizard:

Create masks with well-structured scripts
Flexible Python Scripting
Mask-Code easy to read and reusable
Automated label generation

TXLConverter:

Easily view .txl files with any web browser
Zoom / Pan
Rapid conversion for efficient mask development

Quickstart / Documentation

See the Presentation_Slides and the documentation at https://bithost-gmbh.github.io/txlwizard/

Installation

The TXLWizard is written in python and will run in Python version 2.7+ and 3.1+.

In order to use it, the TXLWizard package must be available as a python package, i.e. either it must be copied to :file:`Path_to_my_python_installation/site-packages/` or to the path where your script is located.

Alternatively, you can also prepend the following command to your python script:

import sys
sys.path.append('path_to_the_folder_containing_TXLWizard')

Please note that this must be the parent folder containing the TXLWizard.

Structure / Pattern / Attribute

The following terms are used throughout this manual:

Structure

Refers to an object containing one or more Pattern objects. A Structure corresponds to the STRUCT command in TXL files.

Pattern

Refers to a pattern such as a circle, a polygon, an ellipse, a path, etc. The following patterns with the corresponding TXL command in brackets are supported:

Circle (C)
Ellipse (ELP)
Polygon (B)
Polyline (P)
Reference (SREF)
Array (AREF)

For more information, supported parameters, etc., see Section :ref:`PythonModuleReferencePatterns`.

Attribute

Refers to an property of a Pattern determining the visual appearance of the Pattern. The following attributes with the corresponding TXL command in brackets are supported:

Layer (LAYER)
DataType (DATATYPE)
RotationAngle (ANGLE)
StrokeWidth (WIDTH)
ScaleFactor (MAG)

Please note that the TXLWizard strictly implements the specification of the TXL format. This implies some peculiarities, such as

Attribute commands preceed the corresponding Pattern in a Structure and are valid for all patterns that follow unless the attribute value is changed. Therefore, when adding a Pattern to a Structure with certain attributes, the attributes are valid for any subsequently added pattern, unless a different attribute value is specified.
Attribute commands are valid for all patterns, except for Reference (SREF) and Array (AREF). Therefore the attributes of a pattern can only be specified in the structure where the pattern is added / defined.
The RotationAngle attribute applies to each Pattern individually and rotates about each Pattern's individual origin.

Example SVG Output

An example output can be seen here:

Example SVG output for a mask

How to start?

Have a look at the examples in https://bithost-gmbh.github.io/txlwizard/Chapters/20_Examples.html and consult the https://bithost-gmbh.github.io/txlwizard/Chapters/40_PythonModuleReference.html. Happy scripting!

TXLConverter

For existing TXL files, there is a command line interface script that converts them to SVG / HTML files.

Usage

The usage is very simple. Simply run the python script Tools/TXLConverterCLI.py. The command line interface will allow you to change the configuration as you wish. Furthermore, the configuration is saved and restored for a subsequent run.

Code

To use the TXLConverter from the command line type

python Tools/TXLConverterCLI.py

Or if you want to call it in your own python script do

import TXLWizard.TXLConverter
TXLConverterCLI = TXLWizard.TXLConverter.TXLConverterCLI()

The resulting command line interface looks as follows:

### TXL Converter v1.6 ###
Converts TXL Files to SVG/HTML
written by Esteban Marin (estebanmarin@gmx.ch)


Full TXL File / Folder Path
If the path is a folder, you can enter the filename separately.
[/home/john.mega/masks]:
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.txl

SampleWidth in um
used to draw coordinate system
[1500]:

SampleHeight in um
used to draw coordinate system
[1500]:

Layers to process
comma-separated, e.g. 1,4,5. Type -1 for all layers.
[-1]:

Do Conversion (y/n)? [y]

Files written:
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.html
/Users/esteban/Desktop/masks2/tmpd/EM160225_GOI_CornerCube_Microbridge.svg

Done

bithost-gmbh / txlwizard